This motorized
XY-axis positioning is made of stainless steel without
cover.
The stage size is 60 x 60 mm.
The travel stroke is 75 mm.
The load capacity is 12 Kgf.
The
resolution is 1 µm / 0.5 µm with 10 / 20
micro-steps per step motor driver.
The typical repeatability accuracy is ± 2 µm.
The typical positioning accuracy is 25 µm.
The maximum speed is 20 mm / sec.
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