This motorized
XY-axis positioning is made of aluminum alloy.
The stage size is 80 x 80 mm.
The travel stroke is 30 mm.
The load capacity is 19 Kgf.
The resolution is 0.5 µm / 0.25 µm with 10 / 20 micro-steps per step motor driver.
The typical repeatability accuracy is ± 1 µm.
The typical positioning accuracy is 15 µm.
The maximum speed is 10 mm / sec.
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